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MASFLO-OVAL II / EXPLOSIONPROOF

Format:FHC, FHD

Liquid

Gas

Steam

The explosionproof MASFLO-OVAL Ⅱ FHC series is the hydrogen explosionproof model of general-purpose mass flowmeter FHA series. Likewise, the FHD series consists of mass flow controllers FHB with hydrogen explosionproof control valve. Explosionproof mass flow controller for gas service can be configured by combining these two instruments. The explosionproof MASFLO-OVAL Ⅱ is most suited for various gas
supply systems, gas mixing processes, and measurement/control of gases used in hazardous areas of a pilot plant, semiconductor manufacturing process, and laboratories.

  • explosionproof
  • low flow . extremely low flow
Features
Product Specifications
Document

FEATURES

1. JIS explosionproof construction "d3aG4" applicable to H2 gas.
2. Wide flow range: 5NCCM (mL/min [normal]) to 500NLM (L/min [normal]) (Up to 100NLM as a controller)
3. Optimal full scale adjustment available with laminar flow eelment.
4. Applicable to a wide pressure range from vacuum up to 39.2MPa
5. Capable of measuring most gases except for highly corrosive gases.
6. Fast response.
7. The control valve is of normally-closed electromagnetic type to provide fast response and safety.
8. Compatible with a wide variety of applications when combined with the readout unit.

Applicable fluid

air

nitrogen

hydrogen

city gasu

natural gas

ethylene gas

other

GENERAL SPECIFICATIONS

機種 FHC (Mass Flowmeter) FHC + FHD (Mass Flowmeter + Controller)
Connection くい込み継手、メタルガスケット面シール継手など
Flow range Min. 0.1mL/min(normal)*1
Max. 500L/min(normal)*1 100L/min(normal)*1
Turndown (MFM) 1 : 50
Control range (MFC) 2 to 100%
Operating temperature range -10 to +50°C
Maximum operating pressure 39.2MPa
Accuracy ± 1% of FS (at actual gas calibration)
Power supply ±15VDC
Body materials Major parts: SUS316
Output signal 0 to 5VDC (standard), 1 to 5VDC, 0 to 20mADC sourcing, 4 to 20mADC sourcing
Construction Explosionproof, IP65相当
Applicable gases 原則として化学式で表わされる気体

*1:Flow ranges listed are based on air.(空気以外で使用する場合は、コンバージョンファクタによる換算が必要)

Specification

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GBF112E-3

FHC, FHD series (Explosionproof)

Features
Product Specifications
Document

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