Flowmeters and System Solutions
Flowmeters and System solution.
Flowmeters and System Solutions
Flowmeters and System solution.
PRODUCTS
Format：FHA, FHB
Liquid
Gas
Steam
The MASFLO-OVAL Ⅱ FHA/FHB series measures and controls the flow rate of gas based on mass. The FHA series consists of highly accurate and compact mass flowmeters (MFM) for gas measurement. The FHB series consists of mass flow controllers (MFC) composed of an electromagnetic control valve integrated with the FHA flowmeter. Simple flow measurement/control system can be configured by combining the FHA/FHB with
the readout unit (ROU). The ROU is equipped with display and setting device. The MASFLO-OVAL Ⅱ is most suited for various gas supply systems, gas mixing processes, and measurement/ control of gases used in the pilot plant, semiconductor manufacturing process, and laboratories.
1. Wide flow range : 5NCCM (mL/min [normal]) to 500NLM (L/min [normal])
2. Optimal full scale adjustment available with laminar flow element.
3. Capable of measuring most gases except for highly corrosive gases.
4. Fast response.
5. The control valve equipped on the mass flow controller is of normally-closed electromagnetic type to provide fast response and safety.
6. Compatible with a wide variety of applications when combined with the readout unit.
air
nitrogen
hydrogen
city gasu
natural gas
ethylene gas
other
| Model | FHA (Mass Flowmeter) | FHB (Mass Flow Controller) | |
|---|---|---|---|
| Connection | くい込み継手、メタルガスケット面シール継手など | ||
| Flow range | Min. | 0.1mL/min(normal)*1 | |
| Max. | 500L/min(normal)*1 | ||
| Turndown (MFM) | 1:50 | － | |
| Control range (MFC) | – | 2 to 100% | |
| Operating temperature range | -10 to +70°C (no condensation) | ||
| Maximum operating pressure | 39.2MPa | 19.6MPa*2 | |
| Accuracy | ± 1% of FS (at actual gas calibration) | ||
| Power supply | ±15VDC | ||
| Body materials | SUS316 | ||
| Output signal | 0 to 5VDC (standard), 1 to 5VDC, 0 to 20mADC sourcing, 4 to 20mADC sourcing | ||
| Construction | Non-explosionproof, for indoor use, IP20 | ||
| Applicable gases | 原則として化学式で表わされる気体 | ||
*1:Flow ranges listed are based on air.（空気以外で使用する場合は、コンバージョンファクタによる換算が必要）
*2:流量により異なる
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FHA, FHB series
