Flowmeters and System Solutions

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MASFLO-OVAL II / THERMAL MASS FLOWMETER/CONTROLLER

Format:FHA, FHB

Liquid

Gas

Steam

MASFLO-OVALⅡ 非防爆_熱式質量流量計

MASFLO-OVALⅡ 非防爆_熱式質量流量計

The MASFLO-OVAL Ⅱ FHA/FHB series measures and controls the flow rate of gas based on mass. The FHA series consists of highly accurate and compact mass flowmeters (MFM) for gas measurement. The FHB series consists of mass flow controllers (MFC) composed of an electromagnetic control valve integrated with the FHA flowmeter. Simple flow measurement/control system can be configured by combining the FHA/FHB with
the readout unit (ROU). The ROU is equipped with display and setting device. The MASFLO-OVAL Ⅱ is most suited for various gas supply systems, gas mixing processes, and measurement/ control of gases used in the pilot plant, semiconductor manufacturing process, and laboratories.

  • low flow . extremely low flow
Features
Product Specifications
Document

FEATURES

1. Wide flow range : 5NCCM (mL/min [normal]) to 500NLM (L/min [normal])
2. Optimal full scale adjustment available with laminar flow element.
3. Capable of measuring most gases except for highly corrosive gases.
4. Fast response.
5. The control valve equipped on the mass flow controller is of normally-closed electromagnetic type to provide fast response and safety.
6. Compatible with a wide variety of applications when combined with the readout unit.

Applicable fluid

air

nitrogen

hydrogen

city gasu

natural gas

ethylene gas

other

GENERAL SPECIFICATIONS

Model FHA (Mass Flowmeter) FHB (Mass Flow Controller)
Connection くい込み継手、メタルガスケット面シール継手など
Flow range Min. 0.1mL/min(normal)*1
Max. 500L/min(normal)*1
Turndown (MFM) 1:50
Control range (MFC) 2 to 100%
Operating temperature range -10 to +70°C (no condensation)
Maximum operating pressure 39.2MPa 19.6MPa*2
Accuracy ± 1% of FS (at actual gas calibration)
Power supply ±15VDC
Body materials SUS316
Output signal 0 to 5VDC (standard), 1 to 5VDC, 0 to 20mADC sourcing, 4 to 20mADC sourcing
Construction Non-explosionproof, for indoor use, IP20
Applicable gases 原則として化学式で表わされる気体

*1:Flow ranges listed are based on air.(空気以外で使用する場合は、コンバージョンファクタによる換算が必要)

*2:流量により異なる

Specification

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GBF111E-3

FHA, FHB series

Features
Product Specifications
Document

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